Troubleshooting Common Problems in Magnetron Sputtered Films

May 09, 2026

Tso lus

magnetron sputtering coating equipment

 

Txheej zaj duab xis yog npub thiab blackened.

(1) Lub tshuab nqus tsev yog qis dua 0.67 Pa, lub tshuab nqus tsev yuav tsum tau nce mus rau 0.13-0.4 Pa.

(2) Argon purity yog qis dua 99.9%. Argon nrog purity ntawm 99.99% yuav tsum tau siv.

(3) Gas filling system to. Cov roj filling system yuav tsum tau kuaj xyuas thiab tshem tawm cov dej ntws tawm.

(4) Primer tsis kho tag nrho. Lub sijhawm kho ntawm primer yuav tsum tau txuas ntxiv kom tsim nyog.

(5) Tshaj qhov cua los ntawm qhov plated. Kev kho kom qhuav thiab sealing yuav tsum tau ua. Cov zaj duab xis txheej nto muaj ib tug dull gloss.

(6) Kho tsis zoo los yog deteriorated primer. Lub sijhawm kho ntawm primer yuav tsum tau txuas ntxiv kom tsim nyog lossis cov primer yuav tsum tau hloov.

(7) Sputtering lub sij hawm ntev dhau lawm. Nws yuav tsum tsim nyog luv luv.

(8) Sputtering zaj duab xis tsim nrawm nrawm heev. Lub sputtering tam sim no lossis voltage yuav tsum raug txo kom tsim nyog.

 

Xim zaj duab xis tsis sib xws

(1) Daim ntawv thov primer tsis sib xws. Txoj kev siv primer yuav tsum tau txhim kho.

(2) Txheej zaj duab xis yog nyias heev. Lub sputtering ceev yuav tsum tau nce kom tsim nyog los yog ncua sij hawm sputtering.

(3) Kev tsim kho tsis tsim nyog. Kev tsim kho fixture yuav tsum tau txhim kho.

(4) Lub geometry ntawm lub plated feem yog complex heev. Kev sib hloov ceev ntawm qhov plated yuav tsum tau nce kom tsim nyog.
 

Wrinkled thiab tawg zaj duab xis

(1) Lub primer yog thov heev tuab. Lub thickness yuav tsum tau tswj nyob rau hauv qhov ntau ntawm 7-10 tan.

(2) Lub viscosity ntawm cov xim yog siab dhau. Nws yuav tsum raug txo kom tsim nyog.

(3) evaporation tus nqi yog ceev heev. Nws yuav tsum tau ua kom tsim nyog qeeb.

(4) Zaj duab xis yog tuab heev. Lub sij hawm sputtering yuav tsum luv kom tsim nyog.

(5) Qhov kub ntawm qhov plated yog siab dhau. Lub sij hawm cua sov ntawm qhov plated yuav tsum tau luv luv kom tsim nyog.
 

Watermarks, ntiv tes, thiab cov hmoov av muaj nyob rau ntawm txheej txheej.

(1) Cov khoom plated tsis txaus kom qhuav tom qab ntxuav. Ua ntej-plating kev kho mob yuav tsum tau ntxiv dag zog.

(2) Cov kua dej los yog qaub ncaug yog txaws rau ntawm qhov chaw plated. Civilized ntau lawm yuav tsum tau ntxiv dag zog; cov neeg ua haujlwm yuav tsum hnav qhov ncauj qhov ntswg.

(3) Cov ntiv tes tso rau ntawm qhov chaw plated tom qab kev sib cuag nrog cov primer. Kev sib cuag nrog cov plated yuav tsum nruj me ntsis txwv.

(4) Muaj cov khoom me me hauv cov xim. Cov xim yuav tsum tau lim los yog hloov.

(5) Electrostatic plua plav tshem tawm tsis muaj txiaj ntsig, lossis muaj cov plua plav feem ntau hauv qhov chaw txau thiab kho qhov chaw. Cov plua plav collector yuav tsum tau hloov, thiab qhov chaw ua haujlwm yuav tsum tau ua kom huv si.

 

Tsis zoo zaj duab xis adhesion

(1) Tsis tiav degreasing ntawm workpiece. Ua ntej-plating kev kho mob yuav tsum tau ntxiv dag zog.

(2) Lub tshuab nqus tsev tsis huv. Lub tshuab nqus tsev yuav tsum tau ntxuav. Nws yog ib qho tseem ceeb uas yuav tsum nco ntsoov tias thaum lub hom phiaj thauj khoom thiab tshem tawm, tes lossis cov khoom tsis huv yuav tsum tsis txhob cuam tshuam nrog cov khoom siv magnetron kom ntseeg tau tias nws huv huv, uas yog ib qho ntawm cov kev ntsuas tseem ceeb los txhim kho cov yeeb yaj kiab adhesion.

(3) Cov khoom siv tsis huv. Lub fixture yuav tsum tau ntxuav.

(4) Kev xaiv primer tsis tsim nyog. Cov primer yuav tsum tau hloov.

(5) Cov txheej txheem sputtering tsis raug. Sputtering txheej txheem tej yam kev mob yuav tsum tau txhim kho.

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