Electron nqaj evaporation yog muab cov khoom ua yeeb yaj kiab tso rau hauv cov atoms los yog kev khiav tawm ntawm cov khoom ua si, tom qab ntawd nkag mus rau hauv cov npoo av substrate thiab maj mam nkag mus rau hauv zaj duab xis.
Electron nqaj Evaporation tau ua kom sov siab dua, ntau dua ntawm cov yeeb yaj kiab ceev, thiab siab dua kev coj dawb huv ntawm zaj duab xis dua li General Cua Sov.
Cov Ntawv Thov:
Hluav Taws Xob Cov Khoom Siv Hluav Taws Xob Ua Yeeb Yam Siv Ntau Cov Khoom Ua Yeeb Yam, Kev Lom Zem Kawg, Kev Ua Yeeb Yam, Lub Siab Ua Si, Xim Yeeb Yaj Duab, thiab lwm yam.
Nws tuaj yeem ua tiav zaj duab xis txheej ntawm 0-50 txheej ntawm zaj duab xis, thiab tseem tuaj yeem ua tau cov txheej txheem txheej txheem ntawm cov khoom xws li lub khob iav, khob lub tais, txias, thiab lwm yam.
Nws tuaj yeem ua ntau yam duab zaj duab xis nrog cov hlau sib txawv, cov duab hluav taws xob thiab muaj peev xwm yaj duab hluav taws xob thiab lwm yam siab {{}}}
Nta:
Lub tshuab siv kho kho kho kho tshiab yog nruab nrog quartz siv lead ua cov yeeb yaj kiab siv tag nrho cov txheej txheem ua haujlwm tag nrho, nrog kev ua haujlwm tau zoo thiab cov khoom lag luam zoo.
Haum rau kev siv los ntawm cov tuam ntxhab hauv cov chaw tsim kho kho qhov muag thiab loj - kev lag luam tsim ntau lawm.
Cov Lus Qhia Tshwj Xeeb:
| OPTERIC txheej TSHUAB | |||||||
|
Tus qauv |
SF-800 |
SF-1200 |
SF-1400 |
SF-1600 |
SFW-1000 |
SFW-1200 |
SFW-1600 |
|
Txoj kab loj |
Φ800 × 1000mm |
Φ1200 × 1400mm |
Φ1400 × 1600mm |
Φ1600 × 1800mm |
Φ1000 × 1100mm |
Φ1200 × 1400mm |
Φ1600 × 1800mm |
|
Lub Tshuab Nqus Tsev |
KT500 Txawb Twj Chav Tsev |
Kt630 diffusion twj tso kua mis tsev |
Dua Kwm KT630 Diffusion Twj Chav Tsev |
Dua Kwm KT630 Diffusion Twj Chav Tsev |
KT500 Txawb Twj Chav Tsev |
Kt630 diffusion twj tso kua mis tsev |
Dua Kwm KT630 Diffusion Twj Chav Tsev |
|
Txheej Txheej |
Lub hauv hluav taws xob evaporation chaw hauv paus, txheej Auxiliary ion muaj kev cia siab fais fab khoom lossis cov cuab ion qhov chaw |
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|
Kev nce nqi |
Kev Ntsuas Siab |
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|
Txoj Kev Tswj Xyuas |
Kev tuav lossis tsis siv neeg tuaj |
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|
Film Thickness Xyuas System |
Quartz crystal zaj duab xis thickness xyuas yam system |
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|
Tso tus nqi |
5 × 10-3pa <15min |
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|
Lub tshuab nqus tsev kawg |
3.0x10-4pa |
||||||
|
Hais txog |
Cov khoom siv saum toj no yog rau kev siv xwb, thiab yog tsim thiab kho raws li cov txheej txheem tiag tiag ntawm cov neeg siv khoom. |
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Cim npe nrov: Hauv cov chaw txawb evaporation nqus tsev txheej khoom, Suav teb cov nqaj evaporation nqus tsev cov khoom siv, chaw muag khoom, Hoobkas
