Txoj kev ua haujlwm
Lub hauv paus ntsiab lus tseem ceeb ntawm cov khoom siv nqus tsev vacuum yog vaporize lossis ionize cov khoom siv hauv lub tshuab nqus tsev, thiab tom qab ntawd tso cai rau cov atoms, molecules lossis ions tso rau ntawm qhov chaw ntawm lub hom phiaj substrate los ua ib lossis ntau cov yeeb yaj kiab nyias.
Nyob rau hauv lub siab - nqus tsev vacuum kaw, ib tug sib nqus teb confines electrons rau ionize argon gas, qhov tshwm sim argon ions bombard ib lub hom phiaj hlau los yog oxide, ua rau lub hom phiaj atoms yuav sputtered tawm thiab tso rau saum npoo ntawm lub workpiece mounted ntawm lub chamber's rotating khib, ib tug txheej txheem ntawm kev txhawb nqa. DC, MF, thiab RF sputtering fais fab khoom siv thiab haum rau ob qho tib si conductive thiab insulating lub hom phiaj, ib tug multi- phiaj configuration enables co-sputtering rau fabrication ntawm ib tug - txheej thiab multilayer composite films.
Khoom nta
Cov txheej txheem zoo yog ruaj khov thiab tsis sib xws, muaj zog adhesion
Lub planetary turntable tsav lub workpieces tig thoob plaws hauv lub chamber, kom ntseeg tau tias zoo ib yam zaj duab xis thickness thoob plaws tag nrho cov batch thiab tiv thaiv tev los yog flaking. Cov txheej txheej yog cov purity siab, thiab lub kaw lus tuaj yeem tsim cov hlau, hlau, thiab dielectric oxide zaj duab xis.
Txhawb qis- txheej txheej kub thiab muab cov substrate broad compatibility
Nruab nrog qhov qis -kub ion- pab qhov chaw raws li tus qauv, ua kom chav tsev - kub txheej nrog qhov tsawg kawg nkaus qhov kub thiab txias, yog li tiv thaiv deformation los ntawm cov cua kub siab.
Cov txheej txheem hloov tau yooj yim, ntau-lub hom phiaj co-sputtering
Lub chamber tuaj yeem teeb tsa nrog ntau lub hom phiaj magnetron, tso cai rau kev thauj khoom ib txhij ntawm cov khoom siv sib txawv.
Tsis siv neeg kaw tag nrho- voj tswj ntawm PLC ua kom yooj yim ntawm kev ua haujlwm
Lub tshuab nqus tsev vacuum, argon roj ntws, lub zog sputtering, turntable rotation ceev, thiab ion qhov chaw tsis yog txhua yam tswj tau. Lub kaw lus nta lub touchscreen HMI thiab tso cai rau presetting ntawm ntau txheej txheej zaub mov txawv.
Lub tshuab nqus tsev vacuum, txhawb nqa tsis yog - tus qauv customization
Kev saib xyuas yooj yim, ruaj khov lub tshuab nqus tsev
Daim ntawv thov:
Cov chav dej da dej, da dej, saib cov rooj plaub / cov hlua, cov tsom iav qhov muag, cov rooj zaum, cov xov tooj ntawm tes, cov ntaub ntawv phau ntawv, npaj ntau yam xim zoo nkauj zaj duab xis, los tiv thaiv-cov duab ntiv tes, thiab corrosion{1}} cov yeeb yaj kiab tiv thaiv.
Cov yeeb yaj kiab zoo
High txheej ceev thiab tsis tshua muaj porosity
Atoms tso los ntawm magnetron sputtering muaj lub zog siab, ua kom muaj zog ntawm qhov chaw txav thiab ntim nruj
Zoo li pinhole-dawb nrog tsawg porosity
Corrosion thiab oxidation kuj tseem ceeb heev rau lub tshuab nqus tsev -evaporated coatings
Cov tshuaj ntsev tsuag tshuaj ntsuam xyuas kev ua tau zoo; haum rau kev tiv thaiv -corrosion thiab zoo nkauj daim ntaub ntawv ntawm chav dej fixtures, hardware, thiab sab nraum zoov Cheebtsam
Cim npe nrov: Magnetron Sputtering Txheej Nqus Deposition Equipment, Tuam Tshoj Magnetron Sputtering Txheej Nqus Deposition Equipment manufacturers, lwm tus neeg, Hoobkas
