Resistance evaporation lub tshuab nqus tsev txheej cov khoom siv feem ntau muaj lub tshuab nqus tsev vacuum thiab lub tshuab nqus tsev twj. Lub tshuab nqus tsev vacuum muaj cov evaporation qhov chaw (piv txwv li, lub tshuab cua sov evaporation), lub substrate thiab substrate yas dhos, lub tshuab cua sov substrate, thiab lub tso pa tawm. Cov khoom siv txheej yog muab tso rau hauv qhov chaw evaporation nyob rau hauv lub tshuab nqus tsev chamber. Nyob rau hauv lub tshuab nqus tsev siab, qhov chaw evaporation heats cov khoom, ua rau nws evaporate. Thaum txoj kev tsis pub dawb ntawm cov vapor molecules tshaj qhov linear dimension ntawm lub tshuab nqus tsev chamber, cov atoms thiab molecules ntawm cov vapor khiav tawm ntawm qhov chaw ntawm cov evaporation nrog me me sib tsoo los yog kev cuam tshuam los ntawm lwm cov molecules los yog atoms, tso cai rau lawv ncaj qha mus txog ntawm lub substrate. Vim qhov kub ntawm lub substrate qis, cov vapor hais condense rau nws los ua ib zaj duab xis.
Txhawm rau txhim kho qhov adhesion ntawm cov evaporated molecules thiab cov substrate, lub substrate tuaj yeem qhib tau los ntawm qhov tsim nyog cua sov lossis ion ntxuav. Cov txheej txheem lub cev koom nrog hauv lub tshuab nqus tsev evaporation txheej, los ntawm cov khoom evaporation thiab thauj mus rau zaj duab xis deposition, yog raws li nram no:
(1) Ntau txoj hauv kev siv los hloov lwm hom kev siv hluav taws xob rau hauv thermal zog, cua sov cov khoom siv hauv cov yeeb yaj kiab kom ua rau evaporation lossis sublimation, ua rau cov khoom siv roj (atoms, molecules, lossis atomic pawg) nrog qee lub zog (0.1 ~ 0.3 eV);
(2) Cov khoom gaseous tawm ntawm cov yeeb yaj kiab nto thiab raug thauj mus rau qhov chaw substrate nyob rau hauv txoj kab ncaj nraim nrog kev sib tsoo me me ntawm qhov ceev ceev;
(3) Cov pa roj carbon monoxide mus txog lub substrate nto condense thiab nucleate, loj hlob mus rau hauv ib qho khoom-theem nyias zaj duab xis;
(4) Cov atoms tsim cov zaj duab xis nyias rov ua dua los yog tsim cov ntawv cog lus tshuaj.
Resistance cua sov evaporation yog qhov yooj yim tshaj plaws thiab feem ntau siv cua sov txoj kev, feem ntau haum rau txheej cov ntaub ntawv nrog melting ntsiab lus hauv qab 1500 degree. Feem ntau, lub siab - melting - taw tes hlau (W, Mo, Ti, Ta, boron nitride, thiab lwm yam) nyob rau hauv daim ntawv ntawm ib tug hlau los yog ntawv yog ua rau ib tug evaporation qhov chaw ntawm tsim nyog cov duab, mus rau lub txheej txheej yog loaded. Lub Joule cua sov ntawm cov tam sim no melts, evaporates, los yog sublimates cov khoom txheej. Cov duab ntawm qhov evaporation feem ntau suav nrog ntau-strand kauv, U-shape, sinusoidal waveform, nyias phaj, nkoj duab, thiab conical pob tawb.
Nyob rau tib lub sijhawm, txoj kev no yuav tsum muaj cov khoom siv evaporation kom muaj cov yam ntxwv xws li cov ntsiab lus siab melting, tsis tshua muaj saturated vapor siab, cov khoom siv tshuaj ruaj khov (tsis muaj tshuaj lom neeg nrog cov txheej txheem ntawm qhov kub thiab txias), kev ua haujlwm kub zoo, thiab lub zog me me sib txawv. Ib tug loj tam sim no yog siv los ntawm cov evaporation qhov chaw rau cua sov thiab evaporate cov txheej txheem ncaj qha, los yog cov txheej txheej yog muab tso rau hauv ib tug crucible ua los ntawm graphite los yog tej yam high - kub resistant hlau oxides (xws li Al₂O₂, BO) rau indirect cua sov thiab evaporation.
Resistance evaporation lub tshuab nqus tsev txheej khoommuaj kev txwv nyob rau hauv zaj duab xis deposition. Cov hlau refractory muaj tsawg vapor pressures, ua rau lawv nyuaj rau tsim cov yeeb yaj kiab nyias; qee cov ntsiab lus yooj yim tsim cov alloys nrog cov cua sov hlau; thiab nws yog qhov nyuaj kom tau txais cov yeeb yaj kiab alloy nrog cov khoom sib xws. Txawm li cas los xij, kev tiv thaiv cua sov evaporation yog ib txoj kev siv dav hauv evaporation vim nws cov qauv yooj yim, tus nqi qis, thiab kev ua haujlwm yooj yim.
