Qhov xwm txheej no tshwm sim ntawm qhov chaw tsim khoom: tus neeg siv khoom muaj kev txiav txim sai, tsuas yog xav tau ob peb lub kaum os cov cuab yeej, tab sis lub tshuab hluav taws xob muaj peev xwm ntau txhiab. Yuav tsum qhib lossis kaw?
Txhawm rau txuag lub sijhawm, feem ntau cov cuab yeej raug muab tso ncaj qha rau hauv qhov cub. Qhov tshwm sim? Xim txawv, zaj duab xis tawg, lossis txawm softening ntawm substrate tom qab annealing.
Nyob rau lub sijhawm no, tus kws kho mob feem ntau kho qhov tsis muaj, kuaj xyuas cov pa roj, thiab xav tias cov khoom siv hauv lub hom phiaj, tab sis saib xyuas qhov tsis pom tseeb tshaj plaws - lub cub tawg yog underloaded.
Niaj hnub no, peb yuav tham txog "kev pab los saum ntuj los" hauv cov cuab yeej plating (tshwj xeeb yog cov txheej txheem rhiab zoo li DLC) uas yooj yim yuam kev rau cov khoom seem hlau- lub dummy load.
Cov li ntawd -hu ua "process parameters" yeej yog "full-load parameters."
Ntau tus txheej txheem txheej txheej muaj kev xav tsis zoo tias yog tias lawv teeb tsa qhov voltage, tam sim no, roj siab, thiab kub kom raug, txheej txheej yuav zoo ib yam.
Qhov no tsis yog lawm.
PVD lub tshuab nqus tsev txheej yog qhov tseem ceeb yog qhov sib npaug sib npaug hauv ib puag ncig plasma. Txhua qhov kev ntsuas koj tau teeb tsa (xws li kev tsis ncaj ncees tam sim no thiab lub hom phiaj tam sim no) raug kho raws li qhov preset "load."
Thaum lub cub tawg puv, cov ntshav sib npaug "pob ntawv" ntau txhiab workpieces; tab sis yuav ua li cas thaum lub cub tawg tsuas muaj ib - feem kaum ntawm cov khoom ua haujlwm, muab tib lub zog ntom ntom?
Lub plasma yuav relentlessly tawm tsam ob peb seem workpieces.
Nws zoo li siv hluav taws kub uas thaum chiv thawj txhais tau tias ua ib lub lauj kaub ntawm cov nqaij, tab sis tam sim no tsuas yog tso cai rau koj ua noj ob daim; qhov tshwm sim uas tsis tuaj yeem yog- cov nqaij kub hnyiab, thiab lub lauj kaub tseem tuaj yeem hlawv.
Peb lub luag haujlwm tseem ceeb ntawm Dummy Loads
Hauv siab- cov cuab yeej kawg plating, tshwj xeeb tshaj yog thaum siv hydrogen-dawb DLC lossis siab- cov txheej tawv tawv, kev siv dummy loads (cov tuav cov cuab yeej pov tseg, cov khoom siv tshwj xeeb, lossis cov khoom hloov pauv) tsis yog rau lub hom phiaj zoo nkauj, tab sis rau kev ciaj sia.
1. Stabilize "thermal inertia" tiv thaiv substrate annealing
Thaum tshav kub kub conduction qeeb heev hauv lub tshuab nqus tsev; nws tsuas yog nyob ntawm hluav taws xob.
Yog hais tias muaj tsawg workpieces nyob rau hauv lub tshuab nqus tsev chamber, tag nrho cov tshav kub muaj peev xwm yuav txo tau heev. Nyob rau hauv tib lub zog cua sov lossis lub zog foob pob hluav taws, lub tshuab ua haujlwm cua sov yuav zoo li lub foob pob hluav taws.
Qhov tshwm sim: Koj lub cuab yeej tuaj yeem pom qhov kub ntawm 450℃xwb, tab sis qhov kub hauv zos ntawm cov kaum ntse ntse lossis cov npoo ntawm cov khoom ua haujlwm tau dhau los ua qhov kub ntawm qhov kub siab ntawm - ceev steel.
Qhov tshwm sim: Cov txheej txheem zoo, tab sis lub cuab yeej hardness poob, ua rau nws tawg tam sim ntawd thaum cov neeg siv khoom. Lub hom phiaj ntawm dummy load yog ua raws li qhov loj "heat absorber," tswj qhov kub thiab txias thiab ua kom cov cua sov nkhaus du thiab tswj tau.
2. "Deceiving" Lub Hwj Chim rau Kev Ruaj Ntseg Tsis Zoo Voltage
Cov khoom siv hluav taws xob tsis zoo yuav tsum kuaj xyuas cov khoom impedance thaum ua haujlwm.
Yog hais tias muaj tsawg workpieces, load impedance yuav txawv heev. Lub hwj chim sib txuas ntawm lub network yuav tsis ua haujlwm zoo, thiab tseem tuaj yeem tshawb pom qhov tsis tseeb "arcing," uas ua rau lub zog nquag -offs lossis waveform distortion.
Qhov tshwm sim: Cov txheej txheej adhesion tsis zoo, thiab txawm tias pitting tshwm sim los ntawm lub zog hluav taws xob tam sim ntawd ua rau cov npoo ua haujlwm.
Cov txiaj ntsig: Los ntawm kev ntxiv cov khoom siv dummy, lub zog hluav taws xob pom qhov "paub" impedance ib puag ncig, ua rau muaj qhov sib luag thiab ruaj khov cov zis tawm.
3. Txhim kho Gas Flow Distribution thiab Plasma Density (Tshwj xeeb yog DLC)
DLC (pob zeb diamond{0}}zoo li Carbon) txheej yog rhiab heev rau kev ntxhov siab sab hauv.
Thaum lub sij hawm carbon zaj duab xis deposition, yog tias qhov chaw thau khoom tsawg dhau, cov pa roj carbon ions ntau dhau mus tsis muaj qhov twg mus, ua rau cov nqi xa tawm sai heev hauv zos thiab muaj kev ntxhov siab ntxiv hauv cov yeeb yaj kiab.
Qhov tshwm sim: Cov yeeb yaj kiab tuaj yeem tawg hauv lub tshuab nqus tsev ua ntej tawm hauv lub chamber, lossis tuaj yeem tev tawm tom qab tso rau ob peb hnub tom qab tawm hauv lub chamber.
Kev daws: Lub dummy load, los ntawm qhov chaw nyob, simulates cov pa paug cuam tshuam thiab noj nyob rau hauv tag nrho cov load, kom ntseeg tau tias tus nqi noj ntawm cov reactive gases yog tswj nyob rau hauv lub qhov rais txheej txheem.
Lub dummy load tsis yog "khoom khib nyiab."
Txij li thaum lub dummy load tseem ceeb heev, koj puas tuaj yeem pov rau hauv cov khoom qub qub?
Qhov no yog qhov yuam kev thib ob uas ntau lub tuam txhab ua.
1. Lub dummy load yuav tsum "huv." Ntau tus neeg ua haujlwm tsuas yog pov rau hauv cov hlau rusty los yog roj-stained jigs los sau qhov chaw.
Cov khoom qias neeg no, thaum rhuab hauv lub tshuab nqus tsev, yuav tso tawm ntau cov dej vapor thiab roj vapor (outgassing).
Kev pom zoo: Dummy loads yuav tsum tau ua tus txheej txheem ntxuav, yam tsawg kawg kom ntseeg tau tias lawv tsis muaj roj thiab xeb.
2. Lub geometry yuav tsum yog "zoo ib yam".
Yog tias koj tab tom pleev xim rau qhov kawg zeb, lub dummy load yuav tsum yog qhov zoo ib yam li tus pas nrig zoo li - cov khoom zoo li.
Yog tias koj tso lub phaj loj loj raws li lub dummy load, nws cov hluav taws xob xa hluav taws xob (ntug cuam tshuam) yuav txawv kiag li ntawm cov pas nrig, cuam tshuam loj heev rau cov txheej txheej ntawm cov khoom nyob ze.
