Txoj kev ua haujlwm:

Nyob rau hauv lub tshuab nqus tsev chamber, ib tug hlau nplaum yog siv los kaw lub glow discharge, ua rau argon ions los bombard lub hom phiaj cov khoom ntawm high speeds, lub hom phiaj atoms yog sputtered tawm thiab tso rau ntawm workpiece nto los ua ib tug tuab nyias zaj duab xis - ib tug txheej txheem cais raws li lub cev Vapor Deposition (PVD).

Khoom nta

Tau tshaj ntau hom sputtering lub hom phiaj
Txhawb DC, MF, thiab RF magnetron sputtering lub hom phiaj, haum rau ob qho tib si hlau thiab oxide ceramic lub hom phiaj, ua kom cov deposition ntawm ob qho tib si hlau thiab insulating dielectric films.

Substrate Revolution thiab Rotation Mechanism
Lub workpiece khib siv lub ntiaj teb kev sib hloov system, ua rau cov khoom ua haujlwm hauv lub tshuab ua kom lub zog ua haujlwm ib txhij tig thiab tig, qhov no ua kom cov yeeb yaj kiab tuab zoo sib xws thoob plaws tag nrho lub cub tawg thiab txo cov xim sib txawv.

Tsawg-Tsub Ion Pre- Kev Kho Mob
Nruab nrog ib qho tsim ua - nyob rau hauv ion ntxuav qhov chaw, lub kaw lus foob pob ua haujlwm saum npoo nrog cov ntshav ua ntej txheej txheej kom tshem tawm cov roj paug thiab oxide txheej. Nws ua rau qis -kub zaj duab xis tso nrog cov cua sov me me, ua rau nws tsim nyog rau kev ua cov cua sov- cov yas rhiab heev xws li ABS thiab PC yam tsis ua rau kub hnyiab lossis deformation.

Independent nqus tsev configuration
Kev sib xyaw ua ke ntawm lub twj tso kua mis turbomolecular, lub twj tso kua mis hauv paus, thiab lub twj tso kua mis rotary vane, kom ntseeg tau tias muaj kev ruaj khov ntawm lub twj tso kua mis.

Tag nrho tsis siv neeg PLC muaj kev tswj hwm qhov system
Cov txheej txheem automation, txheej txheem zaub mov tuaj yeem khaws cia thiab rov qab nrog ib nias.

Precision Gas Flow Control
Siv ntau pawg Flow Controllers (MFCs) kom tswj tau cov roj reactive xws li argon, oxygen, thiab nitrogen, ua rau nws haum rau reactive sputtering deposition ntawm oxide thiab nitride composite films.

Kev ruaj ntseg Interlock Protection
Xws li kev sib cuam tshuam rau lub qhov rooj chamber thiab lub tshuab nqus tsev, nrog rau kev tiv thaiv kev tiv thaiv overload, dej tsis txaus, thiab lub zog tsis ua haujlwm, tsis siv neeg kaw thaum pom qhov tsis txaus ntseeg los tiv thaiv lub hom phiaj thiab lub tshuab nqus tsev.

Daim ntawv thov:

Kho kom zoo nkauj txheej
Saib cov rooj plaub, cov khoom siv hauv chav dej, lub taub hau ntaus golf, khoom siv tes ua, cov khoom ua si, tsheb teeb pom kev zoo, thiab lub xov tooj ntawm tes lossis cov khoom siv hauv tsev thiab cov nyees khawm. Muaj peev xwm ua tau zoo li kub, gunmetal dub, ultra-dub, thiab colour decoating coatings, ua hauj lwm raws li eco- phooj ywg, muaj kuab paug-dawb lwm txoj rau ib txwm dej-raws li electroplating.

Tau tshaj Substrates: ABS yas, iav, ceramics, vuas, thiab ntau yam hlau.

Cov yeeb yaj kiab ua haujlwm
Pwm thiab Tooling: Hnav- tiv thaiv txheej tiv thaiv rau cov cuab yeej txiav thiab pwm / tuag

Qhov zoo

Cov yeeb yaj kiab thickness yog tswj tau thiab rov ua dua.

Nws tuaj yeem tso siab rau cov yeeb yaj kiab ntawm qhov kev txiav txim siab ua ntej, thiab cov txheej txheem sputtering tuaj yeem tau txais cov yeeb yaj kiab tsis sib xws ntawm qhov loj.

Zaj duab xis muaj zog adhesion rau lub substrate.

Qee qhov siab -lub zog sputtered atoms tsim cov qib sib txawv ntawm kev txhaj tshuaj, tsim ib txheej pseudo- diffusion txheej ntawm lub substrate qhov twg cov sputtered atoms thiab substrate atoms fuse nrog ib leeg.

Kev npaj ntawm nyias zaj duab xis ntawm cov ntaub ntawv tshwj xeeb.

Cov yeeb yaj kiab sib xyaw thiab cov yeeb yaj kiab sib xyaw tuaj yeem npaj tau los ntawm sputtering cov ntaub ntawv sib txawv tib lub sijhawm. TiN imitation kub films kuj yuav sputtered.

Cov zaj duab xis muaj siab purity thiab cov zaj duab xis sputtered yuav tsis raug tov nrog cov khoom ntawm crucible heater khoom.

Nruab nrog qis- qhov kub thiab txias ion auxiliary qhov chaw, nws tuaj yeem tsim cov yeeb yaj kiab los ntawm kev txias txias ntawm chav sov yam tsis muaj cua sov, txuag hluav taws xob thiab hluav taws xob, thiab txhim kho kev tsim khoom.

Specification:

Magnetron sputtering txheej tshuab
Qauv	CJ-600	CJ-800	CJ-1000	CJ-1200	CJ-1400	CJ-1500	CJ-1600
Chamber loj	Φ600 × 800 hli	Φ800 × 1000 hli	Φ1000 × 1200MM	Φ1200 × 1400MM	Φ1400 × 1600MM	Φ1500 × 1500 hli	Φ1600 × 1800MM
Lub tshuab nqus tsev	KT400 Diffusion twj tso kua mis	KT500 Diffusion twj tso kua mis	KT800 Diffusion twj tso kua mis	KT630 Diffusion twj tso kua mis	Ob chav KT630 Diffusion twj tso kua mis	Ob chav KT630 Diffusion twj tso kua mis	Ob chav KT630 Diffusion twj tso kua mis
Txheej txheej	DC los yog nruab nrab zaus fais fab mov, txheej auxiliary ion tshwj xeeb fais fab mov
Inflation system	Mass flow meter
Tswj txoj kev	Phau ntawv los yog tag nrho tsis siv neeg
Qhov kawg nqus tsev vacuum	5 X 10-3 Pa
Lus ceeb toom	Cov khoom siv saum toj no tsis yog rau kev siv nkaus xwb, thiab tsim thiab kho raws li cov txheej txheem tiag tiag ntawm cov neeg siv khoom.